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Product description
Parameters
Silicon, as one of important sputtering target raw materials, is mainly used in reaction magnetic control sputtering method to plate SiO2 and SiN and dielectric layers, has characteristics of excellent hardness, optic and dielectric properties, wear and corrosion resistance as one of important functional film materials, has wide application in the fields of optics and micro-electronics, and is the most eye-catching functional material in the international market. Now, it is mainly used in the LCD transparent conducting glass, building LOW-E glass and micro-electronics industries.
Silicon target is classified into monocrystalline and polycrystalline silicon targets.
We can produce monocrystalline and polycrystalline silicon targets in the Czochralski crystal growth method, its crystal particle is uniform, and its diameter can reach 11inch. Silicon targets can be processed into various shapes such as rectangle and round, and can be made in special dimensions according to drawings supported by customers.
1 Product Specification
Material Purity: > 99.999%
Growth method: Czochralski (CZ)
Crystal orientation: P or N
Content of metal impurities: (Al/Fe/Ca/Mg/Cu/Co/Ni/Cr/Mn/Ti/Na/K//P/W/Mo/Zn/Sn) : <2ppm
L*W: Customization
Thickness: Customization
Planeness (TIR): < 1.2μm
Partial planeness (STIR): <0.3μm
Warp: <30μm
2 Physical and Chemical Properties
3. Description of Target-Silicon Target is as follows
(The above can refer to our international website in Alibaba)
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Add：26 YingRui Road, Tai He Du Shi Industrial Park, Xi Qing District, TIAN JIN , China Tel：022-87719516 87719292 Fax：022-87719515 Code：300112